Revolutionizing Semiconductor Metrology

Bridging the gap between conventional wafer metrology and inspection with cutting-edge AI solutions for the angstrom era

About Canopus AI

Founded in 2021, Canopus AI is a fast-growing software and AI company dedicated to revolutionizing wafer and mask metrology and inspection. Moving towards Metrospection, by bridging the gap between conventional wafer metrology and inspection, Canopus AI provides a comprehensive software framework using AI to meet the extreme precision requirements of advanced technology nodes.

Cutting-Edge Deep Learning-based Metrology & Inspection

The company specializes in massive CD-SEM image Metrology, offering unprecedented data throughput and accuracy for OPC/RET applications. Its solutions contribute to optimal lithography performance towards the angstrom era. This platform allows robust EPE based measurements, early identification of critical defects and extensive characterization of process variations and stochastics.

From 2D to 3D Insight

Canopus AI extends its expertise to TEM image metrology, transitioning seamlessly from 2D to 3D. This capability is reinforced by a unique engine for synthetic 2D and 3D SEM image generation, utilizing state-of-the-art AI and Machine Learning algorithms.

As an expert in Computational Metrology, Canopus AI is empowering the semiconductor industry to take the most of SEM and TEM image and master the challenges of angstrom-class manufacturing.

Key Technological Strengths

Computational Metrology Platform

  • Vertex based to pixel-based geometries data handling
  • MULTIGON data support and native curvilinear data operations
  • Best in class CD SEM image processing with ML and AI algorithms

Massive Metrology Processing

  • Process hundreds of thousands of CD SEM images automatically
  • Data filtering to gauge based or EPE based measurements
  • Optimized workflow for high throughput

SEM EPE Metrology for OPC/RET

  • Moving OPC models capability towards angstrom era
  • Process window characterization
  • Curvilinear masks metrology using CDSEM images

Manufacturing Process Control

  • Advanced process control strategies
  • Essential to yield improvement
  • Optimized for high-end technology nodes

TEM Metrology: 2D to 3D

  • Memory applications for process development
  • Advanced FEOL and 3D Memory
  • Process control applications

Synthetic Image Generation

  • AI-based SEM and TEM generation engine
  • Programmed defects generation
  • D2DB data flow capabilities
  • CAD layout and TCAD 3D integration

Our Solutions

Canopus AI delivers comprehensive solutions that address the most challenging requirements of modern semiconductor manufacturing, from advanced metrology to process control and synthetic data generation.

Get in Touch

Ready to revolutionize your semiconductor metrology and inspection processes? Contact us to learn more about how Canopus AI can help you achieve unprecedented precision in the angstrom era.